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Atomic layer deposition
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41	Summer school Atomic Layer Deposition: Method and Applications July 6 – 10, 2015Brescia, ITALY Add to Reading List Source URL: www.instm.it Language: English - Date: 2015-05-07 10:37:41
42	Summer school Atomic Layer Deposition: Method and Applications July 6 – 10, 2015 Brescia, ITALY Location Add to Reading List Source URL: www.instm.it Language: English - Date: 2015-03-11 07:05:34
43	European Cooperation Brussels, 15 May 2014 in the field of Scientific and Technical Research Add to Reading List Source URL: w3.cost.eu Language: English - Date: 2014-05-16 08:14:04 Technology Physics Atomic layer deposition Nanomaterials Thin films Semiconductor device fabrication Nanotechnology Thin film Graphene Chemistry Thin film deposition Emerging technologies
44	Summer school Atomic Layer Deposition: Method and Applications July 6 – 10, 2015 Brescia, ITALY Add to Reading List Source URL: www.instm.it Language: English - Date: 2015-05-07 10:28:49 Law Medical privacy Ethics Privacy Identity management
45	KAUST Repository High Electron Mobility Thin-Film Transistors Based on Solution-Processed Semiconducting Metal Oxide Heterojunctions and Quasi-Superlattices Add to Reading List Source URL: repository.kaust.edu.sa Language: English - Date: 2015-05-31 04:48:59 Zinc oxide Heterojunction Transistor Organic field-effect transistor Gallium nitride QSL 2DEG Atomic layer deposition Threshold voltage Chemistry Inorganic compounds Ultraviolet radiation
46	Atomic Layer Deposition (ALD) Process Solutions from MKS Instruments Add to Reading List Source URL: www.mksinst.com Language: English - Date: 2011-10-14 10:03:01 Thin film deposition Agile software development MKS Integrity Software project management Thin film Calibration Pressure measurement Atomic layer deposition Measurement Technology Software development
47	NorthStar ALD TM Engines for Thin Film Innovation SVT Associates, Inc. Add to Reading List Source URL: www.svta.com Language: English - Date: 2012-09-13 12:40:38 Physics Engineering Atomic layer deposition Thin film Vacuum pump Deposition Ultra-high vacuum Pressure measurement Microelectromechanical systems Vacuum Thin film deposition Technology
48	Photon Factory Activity Report 2009 #27 Part BSurface and Interface 2C/2008S2003 Annealing effects of in-depth profiles in TiN/LaO/HfSiO/SiO2/Si gate stack Add to Reading List Source URL: pfwww.kek.jp Language: English - Date: 2010-12-27 22:22:07 Materials science Semiconductor device fabrication Electronic engineering Superhard materials Condensed matter physics Photoemission spectroscopy Atomic layer deposition Titanium nitride Silicon dioxide Chemistry Emission spectroscopy Matter
49	Photon Factory Activity Report 2008 #26 Part BSurface and Interface 2C/2005S2-002 Control of oxidation and reduction in HfSiON/Si through N2 exposure Hiroyuki KAMADA1, Tatsuhiko TANIMURA1, Satoshi TOYODA1-3, Hir Add to Reading List Source URL: pfwww.kek.jp Language: English* - Date: 2010-01-05 10:36:03 Thin film deposition Electronic engineering High-k dielectric Transistors Ceramic materials Gate dielectric Atomic layer deposition Annealing Equivalent oxide thickness Chemistry Materials science Electromagnetism
50	Photon Factory Activity Report 2009 #27 Part BSurface and Interface 2C/2008S2003 Interfacial reactions for Ru metal-electrode/HfSiON gate stack structures studied Add to Reading List Source URL: pfwww.kek.jp Language: English - Date: 2010-12-27 22:22:07 Semiconductor device fabrication Superhard materials Transistors Ceramic materials Atomic layer deposition High-k dielectric Ruthenium(IV) oxide Silicon dioxide Titanium nitride Chemistry Matter Electronic engineering

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